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Application of keV-energy proton scattering for thin film analysis

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dc.contributor.authorBulgadaryan, D.
dc.contributor.authorSinelnikov, D.
dc.contributor.authorKurnaev, V.
dc.contributor.authorEfimov, N.
dc.contributor.authorBorisyuk, P.
dc.contributor.authorLebedinskii, Y.
dc.contributor.authorСинельников, Дмитрий Николаевич
dc.contributor.authorЕфимов, Никита Евгеньевич
dc.contributor.authorБорисюк, Петр Викторович
dc.contributor.authorЛебединский, Юрий Юрьевич
dc.date.accessioned2024-11-18T15:43:47Z
dc.date.available2024-11-18T15:43:47Z
dc.date.issued2019
dc.description.abstract© 2018 Elsevier B.V. Hydrogen ions are not widely used in low or medium-energy ion scattering spectroscopy. However, in certain cases, the use of non-destructive hydrogen ions with low nuclear stopping may provide additional information compared with noble gas ions. In this work, we describe in situ analysis of nanometer layer deposition of Au on Si and vice versa using keV-energy proton scattering spectroscopy. Ion beam sputtering and thermal evaporation were used for deposition of surface layers. The maximum thickness of deposited layers was measured with X-ray photoelectron spectroscopy and surface profiler. The accuracy of in situ surface layer thickness determination with energy spectra of scattered protons is discussed.
dc.format.extentС. 54-57
dc.identifier.citationApplication of keV-energy proton scattering for thin film analysis / Bulgadaryan,D. [et al.] // Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. - 2019. - 438. - P. 54-57. - 10.1016/j.nimb.2018.10.043
dc.identifier.doi10.1016/j.nimb.2018.10.043
dc.identifier.urihttps://www.doi.org/10.1016/j.nimb.2018.10.043
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85055972624&origin=resultslist
dc.identifier.urihttp://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000453491500011
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/16353
dc.relation.ispartofNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
dc.titleApplication of keV-energy proton scattering for thin film analysis
dc.typeArticle
dspace.entity.typePublication
oaire.citation.volume438
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