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Direct ion content measurements in a non-sputtering magnetron discharge

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dc.contributor.authorKaziev, A. V.
dc.contributor.authorKolodko, D. V.
dc.contributor.authorAgeychenkov, D. G.
dc.contributor.authorTumarkin, A. V.
dc.contributor.authorKharkov, M. M.
dc.contributor.authorStepanova, T. V.
dc.contributor.authorКазиев, Андрей Викторович
dc.contributor.authorКолодко, Добрыня Вячеславич
dc.contributor.authorАгейченков, Дмитрий Григорьевич
dc.contributor.authorТумаркин, Александр Владимирович
dc.contributor.authorХарьков, Максим Михайлович
dc.contributor.authorСтепанова, Татьяна Владимировна
dc.date.accessioned2024-11-21T12:15:02Z
dc.date.available2024-11-21T12:15:02Z
dc.date.issued2019
dc.description.abstractIn present contribution we report the first direct measurements of ion fluxes in a nonsputtering magnetron discharge (NSMD) with Al cathode in Ar/O-2 mixtures. The diagnostic unit comprising three-electrode electrostatic lens ion extractor, magnetic sector mass-analyzer, and a vacuum electron multiplier was calibrated and then used to record the time-resolved ion counts of Al+ and Ar+ both in NSMD and arc regimes. The results clearly indicate that in NSMD the dominant species are Ar ions while Al ion signal is lower than the sensitivity limit due to noise level, in contrast to the arc discharge. The capabilities of the diagnostics setup and its sensitivity limits are discussed.
dc.identifier.citationDirect ion content measurements in a non-sputtering magnetron discharge / Kaziev, A, V [et al.] // Journal of Instrumentation. - 2019. - 14. - 10.1088/1748-0221/14/09/C09004
dc.identifier.doi10.1088/1748-0221/14/09/C09004
dc.identifier.urihttps://www.doi.org/10.1088/1748-0221/14/09/C09004
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dc.identifier.urihttp://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000486989800004
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/18725
dc.relation.ispartofJournal of Instrumentation
dc.titleDirect ion content measurements in a non-sputtering magnetron discharge
dc.typeConference Paper
dspace.entity.typePublication
oaire.citation.volume14
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