Publication:
Silicon and germanium nanostructures formed by spark discharge plasma

Простая страница элемента
dc.contributor.authorYakunin, V. G.
dc.contributor.authorPresnov, D. E.
dc.contributor.authorStepikhova, M. V.
dc.contributor.authorYablonskiy, A. N.
dc.contributor.authorTimoshenko, V. Yu.
dc.contributor.authorТимошенко, Виктор Юрьевич
dc.date.accessioned2024-11-21T10:57:46Z
dc.date.available2024-11-21T10:57:46Z
dc.date.issued2019
dc.description.abstract© Published under licence by IOP Publishing Ltd.Formation of semiconductor nanostructures on the surface of single crystalline silicon and germanium wafers by spark discharge plasma in air was investigated. The prepared nanostructures were analyzed by means of the scanning and transmission electron microscopy and optical spectroscopy of the photoluminescence and Raman scattering. The formed nanostructures exhibit a fractal-like morphology with interconnected nanocrystals of 2-200 nm sizes that is explained by repeated processes of spark ablation and subsequent condensation. While the size and morphology of the nanostructure depend on power sources of the spark discharge, short interaction times of spark discharge plasma and target determine a relatively low efficiency of the chemical oxidation of germanium and silicon, as well as low ionic temperatures of the plasma.
dc.identifier.citationSilicon and germanium nanostructures formed by spark discharge plasma / Yakunin, V.G. [et al.] // Journal of Physics: Conference Series. - 2019. - 1238. - № 1. - 10.1088/1742-6596/1238/1/012052
dc.identifier.doi10.1088/1742-6596/1238/1/012052
dc.identifier.urihttps://www.doi.org/10.1088/1742-6596/1238/1/012052
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85069958227&origin=resultslist
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/18525
dc.relation.ispartofJournal of Physics: Conference Series
dc.titleSilicon and germanium nanostructures formed by spark discharge plasma
dc.typeConference Paper
dspace.entity.typePublication
oaire.citation.issue1
oaire.citation.volume1238
relation.isAuthorOfPublication4cf6bcf1-0992-45ed-af93-68678d96a4da
relation.isAuthorOfPublication.latestForDiscovery4cf6bcf1-0992-45ed-af93-68678d96a4da
relation.isOrgUnitOfPublicationc8407a6f-7272-450d-8d99-032352c76b55
relation.isOrgUnitOfPublication.latestForDiscoveryc8407a6f-7272-450d-8d99-032352c76b55
Файлы
Original bundle
Теперь показываю 1 - 1 из 1
Уменьшенное изображение
Name:
W2955041642.pdf
Size:
888.56 KB
Format:
Adobe Portable Document Format
Description:
Download
Коллекции
Публикации