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Development of a Kinetic Model of Microwave Discharge Plasma in Electron Cyclotron Resonance Mode with Allowance for the Temporal Evolution of the Electron Distribution Function

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dc.contributor.authorStepanov, D. S.
dc.contributor.authorShkol'nikov, E. Y.
dc.contributor.authorСтепанов, Дмитрий Сергеевич
dc.contributor.authorШкольников, Эдуард Яковлевич
dc.date.accessioned2024-11-30T03:07:06Z
dc.date.available2024-11-30T03:07:06Z
dc.date.issued2021
dc.description.abstract© 2021, Pleiades Publishing, Ltd.Abstract: A program to simulate gas-discharge kinetics with allowance for the temporal evolution of the electron-energy distribution function is developed on the example of microwave discharge in molecular deuterium with electron cyclotron resonance. The model includes the averaged heating effect of the microwave field at cyclotron resonance, elastic collisions of electrons with electrons and heavy discharge components, and inelastic excitation and transformation reactions. The program considers the temporal evolution of the electron distribution function within these processes, and an algorithm that changes the boundaries of the design range of the distribution function depending on its current values is developed for it. This makes it possible to consider the function variations over a wide energy range. The conditions determining the algorithm accuracy are developed, and the counting-error dynamics upon variation of the parameters of these conditions is given. The adequacy and reliability of the simulation results, which are estimated based on the values of the introduced errors and comparison with third-party models, are shown.
dc.format.extentС. 10-18
dc.identifier.citationStepanov, D. S. Development of a Kinetic Model of Microwave Discharge Plasma in Electron Cyclotron Resonance Mode with Allowance for the Temporal Evolution of the Electron Distribution Function / Stepanov, D.S., Shkol'nikov, E.Y. // High Temperature. - 2021. - 59. - № 1. - P. 10-18. - 10.1134/S0018151X21010144
dc.identifier.doi10.1134/S0018151X21010144
dc.identifier.urihttps://www.doi.org/10.1134/S0018151X21010144
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85126729867&origin=resultslist
dc.identifier.urihttp://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000770769900002
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/25341
dc.relation.ispartofHigh Temperature
dc.titleDevelopment of a Kinetic Model of Microwave Discharge Plasma in Electron Cyclotron Resonance Mode with Allowance for the Temporal Evolution of the Electron Distribution Function
dc.typeArticle
dspace.entity.typePublication
oaire.citation.issue1
oaire.citation.volume59
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