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Temperature distribution on dielectric membrane structures for sensitive elements of semiconductor gas sensors

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dc.contributor.authorVeselov, D. S.
dc.contributor.authorVoronov, Y. A.
dc.contributor.authorВеселов, Денис Сергеевич
dc.contributor.authorВоронов, Юрий Александрович
dc.date.accessioned2024-11-21T08:27:12Z
dc.date.available2024-11-21T08:27:12Z
dc.date.issued2019
dc.description.abstract© 2019 Published under licence by IOP Publishing Ltd. The aim of this article is to show a simulation of temperature distribution on dielectric membrane structures with membranes of different dielectric materials in the measuring mode of a semiconductor gas sensor. The simulation results were obtained using the software package Synopsys TCAD. In various moments of the measuring cycle were obtained two-dimensional temperature distributions on membrane structures. Dependencies of temperature versus time for the variety of the coordinates on membranes, temperature versus coordinates at the sensitive layer area's highest heat value and temperature versus time in the center of the membranes are presented. Recommendations are given for the selection of membrane material for the heat-insulating membrane structure of sensitive elements for semiconductor gas sensors.
dc.identifier.citationVeselov, D. S. Temperature distribution on dielectric membrane structures for sensitive elements of semiconductor gas sensors / Veselov, D.S., Voronov, Y.A. // IOP Conference Series: Materials Science and Engineering. - 2019. - 498. - № 1. - 10.1088/1757-899X/498/1/012037
dc.identifier.doi10.1088/1757-899X/498/1/012037
dc.identifier.urihttps://www.doi.org/10.1088/1757-899X/498/1/012037
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85065557895&origin=resultslist
dc.identifier.urihttp://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000472784800037
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/17971
dc.relation.ispartofIOP Conference Series: Materials Science and Engineering
dc.titleTemperature distribution on dielectric membrane structures for sensitive elements of semiconductor gas sensors
dc.typeConference Paper
dspace.entity.typePublication
oaire.citation.issue1
oaire.citation.volume498
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relation.isAuthorOfPublicatione129f8c7-f3c9-452b-8604-635e6f2f65b6
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