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Flux of High-Energy Positive Oxygen Ions from Plasma to a Substrate in a Pulsed Magnetron Discharge with a Hot Target

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dc.contributor.authorKolodko, D. V.
dc.contributor.authorKaziev, A. V.
dc.contributor.authorAgeichenkov, D. G.
dc.contributor.authorLisenkov, V. Y.
dc.contributor.authorКолодко, Добрыня Вячеславич
dc.contributor.authorКазиев, Андрей Викторович
dc.contributor.authorАгейченков, Дмитрий Григорьевич
dc.date.accessioned2024-12-27T12:22:03Z
dc.date.available2024-12-27T12:22:03Z
dc.date.issued2023
dc.format.extentС. 1249-1251
dc.identifier.citationFlux of High-Energy Positive Oxygen Ions from Plasma to a Substrate in a Pulsed Magnetron Discharge with a Hot Target / Kolodko, D. V. [et al.] // Journal of Communications Technology and Electronics. - 2023. - 68. - № 10. - P. 1249-1251. - 10.1134/S1064226923100078
dc.identifier.doi10.1134/S1064226923100078
dc.identifier.urihttps://www.doi.org/10.1134/S1064226923100078
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85179836974&origin=resultslist
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/29522
dc.relation.ispartofJournal of Communications Technology and Electronics
dc.titleFlux of High-Energy Positive Oxygen Ions from Plasma to a Substrate in a Pulsed Magnetron Discharge with a Hot Target
dc.typeArticle
dspace.entity.typePublication
oaire.citation.issue10
oaire.citation.volume68
relation.isAuthorOfPublicationd637fefd-25d3-4a2d-9d90-813756555eb3
relation.isAuthorOfPublicationc70d4049-e1f0-4840-8e36-73b5eeafc0a2
relation.isAuthorOfPublication956e020e-00eb-4777-ba10-ea2967ec097d
relation.isAuthorOfPublication.latestForDiscoveryd637fefd-25d3-4a2d-9d90-813756555eb3
relation.isOrgUnitOfPublication06e1796d-4f55-4057-8d7e-bb2f3b5676f5
relation.isOrgUnitOfPublicationdcdb137c-0528-46a5-841b-780227a67cce
relation.isOrgUnitOfPublication.latestForDiscovery06e1796d-4f55-4057-8d7e-bb2f3b5676f5
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