Publication: MAGNETRON SPUTTER DEPOSITION OF TUNGSTEN COATINGS IN DEUTERIUM-HELIUM MIXTURES
Дата
2023
Авторы
Kharkov, M.M.
Kolodko, D.V.
Kukushkina, M.S.
Kaziev, A.V.
Tumarkin, A.V.
Ogorodnikova, O. V.
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Аннотация
The electrical parameters of a high-power impulse magnetron sputtering (HiPIMS) discharge operating in H-2/He mixtures were studied using different values of the pulse width, repetition frequency, and power. Deposition of tungsten (W) coatings was carried out in a magnetron discharge with a thermally insulated W target in two regimes at different pulse widths (80 and 500 mu s) and frequencies (2 and 0.5 kHz). The average discharge power was fixed at P-d = 1500 W. Fusion-relevant molecular deuterium/ helium (He) and hydrogen/He gas mixtures with a 90/10 flow ratio were used in the experiments.
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MAGNETRON SPUTTER DEPOSITION OF TUNGSTEN COATINGS IN DEUTERIUM-HELIUM MIXTURES / Kharkov, M.M. [et al.] // HIGH TEMPERATURE MATERIAL PROCESSES. - 2023. - 27. - № 4. - P. 25-32