Publication: Determination of Spatial Distributions of Plasma Parameters of a Compact Magnetron Discharge
Дата
2019
Авторы
Gradov, V. M.
Serushkin, S. V.
Zemtsov, I. A.
Zimin, A. M.
Journal Title
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Volume Title
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Аннотация
© 2019, Pleiades Publishing, Ltd.In this paper, the hardware-software high resolution measuring system for studying the spatial and spectral distributions of the radiation intensity of a magnetron discharge is described. The emission spectra are recorded and processed for subsequent determination of the temperature and density of plasma electrons. These parameters are calculated on the basis of a technique suggesting the absence of ionization equilibrium and the Boltzmann distribution of populations of energy levels of the plasma-forming gas. The data on the electron density, atomic distributions by excited states, and the degree of their deviation from equilibrium in the entire volume of the discharge are presented.
Описание
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Цитирование
Determination of Spatial Distributions of Plasma Parameters of a Compact Magnetron Discharge / Gradov, V.M. [et al.] // Physics of Atomic Nuclei. - 2019. - 82. - № 10. - P. 1376-1381. - 10.1134/S1063778819100107
URI
https://www.doi.org/10.1134/S1063778819100107
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https://www.scopus.com/record/display.uri?eid=2-s2.0-85082424590&origin=resultslist
http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000520312400009
https://openrepository.mephi.ru/handle/123456789/19504