2019, Bulgadaryan, D., Sinelnikov, D., Kurnaev, V., Efimov, N., Borisyuk, P., Lebedinskii, Y., Синельников, Дмитрий Николаевич, Ефимов, Никита Евгеньевич, Борисюк, Петр Викторович, Лебединский, Юрий Юрьевич

© 2018 Elsevier B.V. Hydrogen ions are not widely used in low or medium-energy ion scattering spectroscopy. However, in certain cases, the use of non-destructive hydrogen ions with low nuclear stopping may provide additional information compared with noble gas ions. In this work, we describe in situ analysis of nanometer layer deposition of Au on Si and vice versa using keV-energy proton scattering spectroscopy. Ion beam sputtering and thermal evaporation were used for deposition of surface layers. The maximum thickness of deposited layers was measured with X-ray photoelectron spectroscopy and surface profiler. The accuracy of in situ surface layer thickness determination with energy spectra of scattered protons is discussed.

2017, Васильев, О. С., Борисюк, П. В., Козлова, Т. И., Лебединский, Ю. Ю., Борисюк, Петр Викторович, Лебединский, Юрий Юрьевич, Козлова, Татьяна Ивановна, Васильев, Олег Станиславович

The results of the study of electron properties evolution of monodisperse thin films consisted of Ta and Mo metal nanoclusters deposited onto the SiO2/Si(001) surface with magnetron sputtering method are presented. The changes in chemical composition and electron structure of the samples were controlled by means of X-ray photoelectron spectroscopy in the UHV analysis chamber of the Multiprobe MXPS RM VT AFM-25 surface analysis system. Susceptibility to oxidation after exposure to atmosphere was studied.