2019, Kazieva, T. V., Gubskiy, K. L., Kuznetsov, A. P., Reshetov, V. N., Казиева, Татьяна Вадимовна, Губский, Константин Леонидович, Кузнецов, Андрей Петрович, Решетов, Владимир Николаевич

© 2019 Optical Society of America.A three-coordinate heterodyne laser interferometer has been developed to measure the displacement of the probe microscope scanner with a subnanometer resolution that provides traceability of measurements to the standard of meter through the wavelength of a stabilized He–Ne laser. Main sources of errors are investigated, and their influence is minimized so that the resulting measurement uncertainty of the system does not exceed 0.2 nm, and the resolution is 0.01 nm. The investigation of metrological characteristics of the three-coordinate interferometer was carried out with a scanning probe microscopy (SPM) NanoScan-3D using TGZ-type calibration gratings. The values measured with SPM fell within the 95% confidence interval given by Physikalisch-Technische Bundesanstalt (PTB) (Germany). SPM equipped with a laser interferometer was used to measure the characteristics of dynamic etalons of geometric dimensions.

2020, Kazieva, T. V., Gubskiy, K. L., Reshetov, V. N., Kuznetsov, A. P., Казиева, Татьяна Вадимовна, Губский, Константин Леонидович, Решетов, Владимир Николаевич, Кузнецов, Андрей Петрович

© Published under licence by IOP Publishing Ltd.The paper describes a method for measuring the surface area function of the tips of the probes of nanohardness testers using a laser interferometer. The features of the developed system provide traceability of measurements to the standard of length through the wavelength of a stabilized source of laser radiation. In addition, it is possible to measure the parameters of the probe tip without removing it from the nanohardness tester, which allows the device not to be taken out of working condition and provides unambiguous measurements.