2017, Васильев, О. С., Борисюк, П. В., Козлова, Т. И., Лебединский, Ю. Ю., Борисюк, Петр Викторович, Лебединский, Юрий Юрьевич, Козлова, Татьяна Ивановна, Васильев, Олег Станиславович

The results of the study of electron properties evolution of monodisperse thin films consisted of Ta and Mo metal nanoclusters deposited onto the SiO2/Si(001) surface with magnetron sputtering method are presented. The changes in chemical composition and electron structure of the samples were controlled by means of X-ray photoelectron spectroscopy in the UHV analysis chamber of the Multiprobe MXPS RM VT AFM-25 surface analysis system. Susceptibility to oxidation after exposure to atmosphere was studied.