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Степанова, Татьяна Владимировна

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Институт лазерных и плазменных технологий
Стратегическая цель Института ЛаПлаз – стать ведущей научной школой и ядром развития инноваций по лазерным, плазменным, радиационным и ускорительным технологиям, с уникальными образовательными программами, востребованными на российском и мировом рынке образовательных услуг.
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Степанова
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Татьяна Владимировна
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2023 - 20242
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Автор: Kaziev, A. V. × Имеет файлы: Yes ×

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    Preparation of Alumina Thin Films by Reactive Modulated Pulsed Power Magnetron Sputtering with Millisecond Pulses
    (2024) Tumarkin, A. V.; Kolodko, D. V.; Kharkov, M. M.; Stepanova, T. V.; Kaziev, A. V.; Samotaev, N. N.; Oblov, K. Yu.; Тумаркин, Александр Владимирович; Колодко, Добрыня Вячеславич; Харьков, Максим Михайлович; Степанова, Татьяна Владимировна; Казиев, Андрей Викторович; Самотаев, Николай Николаевич; Облов, Константин Юрьевич
    Thispaper aims to investigate the quality of thin alumina films deposited on glass samples using magnetron sputtering in the reactive modulated pulsed power mode (MPPMS) and evaluate the process productivity. The aluminum target was sputtered in Ar/O2 gas mixtures with different fractions of oxygen in the total gas flow, in the fixed pulsed voltage mode. The pulse-on duration was varied between 5 and 10 ms, while the pulse-off time was 100 or 200 ms. The dependences of mass deposition rate and discharge current on the oxygen flow were measured, and the specific deposition rate values were calculated. Prepared coatings had a thicknesses of 100ў??400 nm. Their quality was assessed by scratch testing and by measuring density, refractory index, and extinction coefficient for different power management strategies. The strong influence of pulse parameters on the coating properties was observed, resulting in a maximum density of 3.6 g/cm3 and a refractive index of 1.68 for deposition modes with higher duty cycle values. Therefore, adjusting the pulse-on and pulse-off periods in MPPMS can be used not only to optimize the deposition rate but also as a tool to tune the optical characteristics of the films. The performance of the studied deposition method was evaluated by comparing the specific growth rates of alumina coatings with the relevant data for other magnetron discharge modes. In MPPMS, a specific deposition rate of 200 nm/min/kW was obtained for highly transparent Al2O3, without using any dedicated feedback loop system for oxygen pressure stabilization, which makes MPPMS superior to short-pulse high-power impulse magnetron sputtering (HiPIMS) modes.
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    High temperature vacuum tests of MoS2coating
    (2023) Prozhega, M. V.; Rechikov, E. O.; Besshapov, P. P.; Babinets, I. S.; Kharkov, M. M.; Rykunov, G. I.; Kaziev, A. V.; Kukushkina, M. S.; Kolodko, D. V.; Stepanova, T. V.; Харьков, Максим Михайлович; Казиев, Андрей Викторович; Кукушкина, Маргарита Сергеевна; Колодко, Добрыня Вячеславич; Степанова, Татьяна Владимировна
    Tribological parameters of samples of bronze substrates coated with MoS2 were investigated. The friction tests were carried out at load 7N, temperature of 250В°C in vacuum according to ASTM G133. Magnetron sputtering was used to deposit MoS2 coatings. A 100Cr6 steel ball was used as a counter-sample. Based on the results of the experiments, the values of the friction coefficient of the coatings and their comparative service lifetime were obtained. The results can be used in the manufacturing of devices operating in similar conditions.