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Influence of nanosecond laser irradiation on the structure and conductivity of BCx films

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dc.contributor.authorZinin, P. V.
dc.contributor.authorFilonenko, V. P.
dc.contributor.authorTroyan, I. A.
dc.contributor.authorBulatov, K. M.
dc.contributor.authorRomanov, R. I.
dc.contributor.authorFominski, V. Y.
dc.contributor.authorVasil'Evskii, I. S.
dc.contributor.authorSafonov, D. A.
dc.contributor.authorFominski, D. V.
dc.contributor.authorSoloviev, A. A.
dc.contributor.authorРоманов, Роман Иванович
dc.contributor.authorФоминский, Вячеслав Юрьевич
dc.contributor.authorВасильевский, Иван Сергеевич
dc.contributor.authorСафонов, Данил Андреевич
dc.contributor.authorФоминский, Дмитрий Вячеславович
dc.contributor.authorСоловьев, Алексей
dc.date.accessioned2024-11-21T10:56:40Z
dc.date.available2024-11-21T10:56:40Z
dc.date.issued2019
dc.description.abstract© Published under licence by IOP Publishing Ltd.Thin-film precursors of BCx were formed by pulsed laser codeposition of boron and carbon. Targets made of pressed boron and carbon powders with an equal element content (B/C = 1/1) and an increased carbon content (B/C = 1/3) were used. The films were deposited on sapphire substrates at elevated temperature (700C) which determined the initial properties of the precursor BCx films. Irradiation of the films was carried out by laser pulses of nanosecond duration with varying intensity. The films obtained by laser annealing of BCx (Q-BCx) were studied by scanning electron microscopy and micro-Raman spectroscopy. Irradiation under optimal conditions made allowed to realize pulsed melting of the films and partial preservation of their continuity on the substrate. The local structure of Q-BCx films and the nature of the changes in their electrophysical properties depended on the composition of the precursor films and the laser irradiation regimes.
dc.identifier.citationInfluence of nanosecond laser irradiation on the structure and conductivity of BCx films / Zinin, P.V. [et al.] // Journal of Physics: Conference Series. - 2019. - 1238. - № 1. - 10.1088/1742-6596/1238/1/012008
dc.identifier.doi10.1088/1742-6596/1238/1/012008
dc.identifier.urihttps://www.doi.org/10.1088/1742-6596/1238/1/012008
dc.identifier.urihttps://www.scopus.com/record/display.uri?eid=2-s2.0-85069967579&origin=resultslist
dc.identifier.urihttps://openrepository.mephi.ru/handle/123456789/18522
dc.relation.ispartofJournal of Physics: Conference Series
dc.titleInfluence of nanosecond laser irradiation on the structure and conductivity of BCx films
dc.typeConference Paper
dspace.entity.typePublication
oaire.citation.issue1
oaire.citation.volume1238
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