Publication:
Activation energy of silicon diffusion in gallium oxide: Roles of the mediating defects charge states and phase modification

Дата
2021
Авторы
Azarov, A.
Vines, L.
Monakhov, E.
Lee, I. -H.
Venkatachalapathy, V.
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Научные группы
Организационные подразделения
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Организационная единица
Институт ядерной физики и технологий
Цель ИЯФиТ и стратегия развития - создание и развитие научно-образовательного центра мирового уровня в области ядерной физики и технологий, радиационного материаловедения, физики элементарных частиц, астрофизики и космофизики.
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Аннотация
© 2021 Author(s).Silicon (Si) is an efficient n-type dopant in gallium oxide (Ga2O3) - an ultra-wide bandgap semiconductor promising in a number of applications. However, in spite of the technological importance for device fabrication, the activation energy for Si diffusion in Ga2O3 is missing in the literature. In the present work, we do such measurements in ion implanted monoclinic β-Ga2O3 samples employing anneals in air ambient, also admitting the influence of potential ion beam induced phase modifications on diffusion. Importantly, we show that Si diffusion in β-Ga2O3 fits with the concentration dependent diffusion model, involving neutral and single negatively charged point defects to mediate the process; so that we assumed gallium vacancies in the corresponding charge states to assist Si diffusion in β-Ga2O3 with activation energies of 3.2 ± 0.3 and 5.4 ± 0.4 eV, respectively. Moreover, we also found that a preexisting phase modified surface layer efficiently suppressed Si diffusion in β-Ga2O3 for temperatures up to 1000 °C.
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Activation energy of silicon diffusion in gallium oxide: Roles of the mediating defects charge states and phase modification / Azarov, A. [et al.] // Applied Physics Letters. - 2021. - 119. - № 18. - 10.1063/5.0070045
URI
https://www.doi.org/10.1063/5.0070045
 https://www.scopus.com/record/display.uri?eid=2-s2.0-85118759992&origin=resultslist
 http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Alerting&SrcApp=Alerting&DestApp=WOS_CPL&DestLinkType=FullRecord&UT=WOS:000715768700010
 https://openrepository.mephi.ru/handle/123456789/24942
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