Персона: Колодко, Добрыня Вячеславич
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LEIS ANALYSIS OF THE W SURFACE DURING WATER VAPOR ADSORPTION
The adsorption of water on the surface is one of the main problems in vacuum technology. Since water is a good adsorbent, its adsorption is the reason that prevents the fast pumping of vacuum systems up to ultra-high vacuum. In addition, water vapor adsorption on metal surfaces during plasma surface interaction is a problem [1]. Singly scattered and recoil ions could form narrow peaks in energy spectra and provide information about atomic composition of the first atomic layer giving information about structure and composition of the surface and very sensitivity to the first layer of atoms [2 -5]. It was also shown [6] that the thickness of light element thin layers on the heavy substrate can be analyzed with good depth resolution (~0,3nm) due to scattering of hydrogen ions with keV energies. Application of ion scattering spectroscopy at pressures up to several mTorr is presented in [7, 8]. In this work experimental results of low energy ion spectroscopy (LEIS) of W samples during water vapor adsorption are presented.
Model of a Plasma Layer Formed by an Electron Beam
© 2020, Pleiades Publishing, Ltd.Abstract—: Results are presented of the particle-in-cell numerical simulations by the KARAT code of the formation of a plasma–beam discharge in the absence of both the longitudinal magnetic field and the initial plasma. Oscillations of the electric field generated by the plasma–beam instability in the electron beam region almost do not affect the plasma at the periphery of the system. Simulation results are compared to the results obtained earlier by a simplified model and to the results of test experiments. The spatial distributions of the plasma density and electron temperature qualitatively agree with the experimental results.
Deposition of Metal-Doped Diamond-Like Films Using a Hollow Cathode Discharge
© 2020, Pleiades Publishing, Inc.Abstract—A simple technique is presented for producing diamond-like films with copper impurity by sputtering the surface of a copper cathode with argon ions in a glow discharge with a hollow cathode with simultaneous chemical deposition diamond-like films on its surface. It was shown that a small (up to 1: 1000) admixture of propane at the pressure of the plasma forming gas of 40 Pa does not affect the plasma parameters, however, it allows you to vary the relative copper content in the diamond-like film.
On the possibility of indirect measurement of the thin carbon films thickness using energy-dispersive analysis
© 2021 Elsevier B.V.The article describes theoretical feasibility of a technique for indirect measurement of the thin carbon films thickness using energy dispersive x-ray spectroscopy. The method is based on measuring the ratio of the characteristic radiation from the substrate material below the analyzed carbon film and from the material of the additional covering layer. The technique was compared with a well-known method based on measuring the characteristic substrate material radiation. The possibilities and limits of applicability of the energy dispersive spectroscopy for the thickness determination of thin carbon films were qualitatively determined by Monte Carlo numerical simulation method of characteristic x-ray spectra.
Growth of Thin Graphite Films on a Dielectric Substrate using Heteroepitaxial Synthesis
A technique for growing thin graphite films on a dielectric substrate by annealing the Al2O3(0001)/Ni(111)/ta-C structure has been optimized. This technique is based on catalytic decomposition of hydrocarbons on the surface of a single-crystal catalyst metal film on a dielectric substrate and subsequent diffusion and crystallization of carbon between the metal film and the substrate. A thin graphite film with a low density of crystal-structure defects is obtained on the dielectric substrate after chemical etching of the metal film.