Персона: Агейченков, Дмитрий Григорьевич
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Институт лазерных и плазменных технологий
Стратегическая цель Института ЛаПлаз – стать ведущей научной школой и ядром развития инноваций по лазерным, плазменным, радиационным и ускорительным технологиям, с уникальными образовательными программами, востребованными на российском и мировом рынке образовательных услуг.
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Агейченков
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Дмитрий Григорьевич
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- ПубликацияОткрытый доступCurrent-voltage characteristics of an impulse magnetron discharge in target material vapor(2020) Kaziev, A. V.; Leonova, K. A.; Kharkov, M. M.; Tumarkin, A. V.; Kolodko, D. V.; Khomyakov, A. Y.; Ageychenkov, D. G.; Казиев, Андрей Викторович; Харьков, Максим Михайлович; Тумаркин, Александр Владимирович; Колодко, Добрыня Вячеславич; Агейченков, Дмитрий Григорьевич© Published under licence by IOP Publishing Ltd.The magnetron discharge with hot (uncooled) target in an impulse mode has been experimentally investigated. The I-V characteristics have been measured depending on the magnetic field strength for three target materials: copper, chromium, and silicon. For melted copper and hot chromium targets, stable gasless (no argon) operation of the magnetron has been demonstrated with maximum impulse power densities about 2.5 kW/cm2 (averaged over the racetrack area). For silicon target, maximum impulse power density was 1.5 kW/cm2 at low argon pressure (0.1 Pa). The magnetic field dependences of discharge parameters have shown the associated changes in differential plasma impedance.
- ПубликацияТолько метаданныеDirect ion content measurements in a non-sputtering magnetron discharge(2019) Kaziev, A. V.; Kolodko, D. V.; Ageychenkov, D. G.; Tumarkin, A. V.; Kharkov, M. M.; Stepanova, T. V.; Казиев, Андрей Викторович; Колодко, Добрыня Вячеславич; Агейченков, Дмитрий Григорьевич; Тумаркин, Александр Владимирович; Харьков, Максим Михайлович; Степанова, Татьяна ВладимировнаIn present contribution we report the first direct measurements of ion fluxes in a nonsputtering magnetron discharge (NSMD) with Al cathode in Ar/O-2 mixtures. The diagnostic unit comprising three-electrode electrostatic lens ion extractor, magnetic sector mass-analyzer, and a vacuum electron multiplier was calibrated and then used to record the time-resolved ion counts of Al+ and Ar+ both in NSMD and arc regimes. The results clearly indicate that in NSMD the dominant species are Ar ions while Al ion signal is lower than the sensitivity limit due to noise level, in contrast to the arc discharge. The capabilities of the diagnostics setup and its sensitivity limits are discussed.
- ПубликацияТолько метаданныеIon current optimization in a magnetron with tunable magnetic field configuration(2021) Kaziev, A. V.; Ageychenkov, D. G.; Tumarkin, A. V.; Kolodko, D. V.; Sergeev, N. S.; Kharkov, M. M.; Leonova, K. A.; Казиев, Андрей Викторович; Агейченков, Дмитрий Григорьевич; Тумаркин, Александр Владимирович; Колодко, Добрыня Вячеславич; Сергеев, Никита Сергеевич; Харьков, Максим Михайлович© 2021 Institute of Physics Publishing. All rights reserved.The response of the ion current in the substrate region to the magnetic system configuration of a circular magnetron was studied during direct current sputtering of aluminum target. The unbalancing degree induced by changing of magnets’ positions was modelled with finite element methods. The ion saturation current in the substrate region showed more than twofold variation with unbalancing degree in the range 0.6–1.2. The dependence was non-monotonic, and the system was optimized to maximize the substrate ion current. The Langmuir probe diagnostics showed plasma density ~ 1016 m–3 in the optimized magnetic configuration.
- ПубликацияТолько метаданныеEvidence of 1000 eV positive oxygen ion flux generated in reactive HiPIMS plasma(2023) Kolodko, D. V.; Ageychenkov, D. G.; Lisenkov, V. Y.; Kaziev, A. V.; Колодко, Добрыня Вячеславич; Агейченков, Дмитрий Григорьевич; Казиев, Андрей ВикторовичThe arrival of highly energetic (near 1000 eV) positive atomic oxygen ions at the substrate region has been detected in a unipolar reactive high-power impulse magnetron sputtering process operated with an uncooled copper target in argon-oxygen mixtures. Examination of the ion fluxes from discharge plasma was performed with a magnetic sector mass-spectrometer and an electrostatic energy analyzer. The energy of fast positive O+ ions is close to the value of eV (d) (e-elementary charge, V (d)-discharge voltage), which indicates their connection to the well-studied fraction of negative O- ions, which undergo acceleration in the cathode sheath. After switching the oxygen gas supply off, the flux of energetic O+ species decreases gradually as the poisoned target surface layers become depleted of oxygen due to sputtering in pure argon. Presumably, the observed energetic O+ ions originate as a result of low-angle scattering of fast negative O- ions from other charged or neutral species in the plasma followed by electron detachment, ionization, or charge exchange.
- ПубликацияТолько метаданныеFlux of High-Energy Positive Oxygen Ions from Plasma to a Substrate in a Pulsed Magnetron Discharge with a Hot Target(2023) Kolodko, D. V.; Kaziev, A. V.; Ageichenkov, D. G.; Lisenkov, V. Y.; Колодко, Добрыня Вячеславич; Казиев, Андрей Викторович; Агейченков, Дмитрий Григорьевич
- ПубликацияТолько метаданныеAdditive production of a material based on an acrylic polymer with a nanoscale layer of zno nanorods deposited using a direct current magnetron discharge: Morphology, photoconversion properties, and biosafety(2021) Burmistrov, D. E.; Yanykin, D. V.; Paskhin, M. O.; Nagaev, E. V.; Kaziev, A. V.; Ageychenkov, D. G.; Казиев, Андрей Викторович; Агейченков, Дмитрий Григорьевич© 2021 by the authors. Licensee MDPI, Basel, Switzerland.On the basis of a direct current magnetron, a technology has been developed for producing nanoscale‐oriented nanorods from zinc oxide on an acrylic polymer. The technology makes it possible to achieve different filling of the surface with zinc oxide nanorods. The nanorods is par-tially fused into the polymer; the cross section of the nanorods is rather close to an elongated ellipse. It is shown that, with intense abrasion, no delamination of the nanorods from the acrylic polymer is observed. The zinc oxide nanorods abrades together with the acrylic polymer. Zinc oxide nano-rods luminesces with the wavelength most preferable for the process of photosynthesis in higher plants. It was shown that plants grown under the obtained material grow faster and gain biomass faster than the control group. In addition, it was found that on surfaces containing zinc oxide nano-rods, a more intense formation of such reactive oxygen species as hydrogen peroxide and hydroxyl radical is observed. Intensive formation of long‐lived, active forms of the protein is observed on the zinc oxide coating. The formation of 8‐oxoguanine in DNA in vitro on a zinc oxide coating was shown using ELISA method. It was found that the multiplication of microorganisms on the developed material is significantly hampered. At the same time, eukaryotic cells of animals grow and develop without hindrance. Thus, the material we have obtained can be used in photonics (photo-conversion material for greenhouses, housings for LEDs), and it is also an affordable and non‐toxic nanomaterial for creating antibacterial coatings.