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Этрекова, Майя Оразгельдыевна

Организационные подразделения

Организационная единица

Институт нанотехнологий в электронике, спинтронике и фотонике

Институт ИНТЭЛ занимается научной деятельностью и подготовкой специалистов в области исследования физических принципов, проектирования и разработки технологий создания компонентной базы электроники гражданского и специального назначения, а также построения современных приборов на её основе. Наша основная цель – это создание и развитие научно-образовательного центра мирового уровня в области наноструктурных материалов и устройств электроники, спинтроники, фотоники, а также создание эффективной инновационной среды в области СВЧ-электронной и радиационно-стойкой компонентной базы, источников ТГц излучения, ионно-кластерных технологий материалов.

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Этрекова

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Майя Оразгельдыевна

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Только метаданные
Printed Miniaturized Platinum Heater on Ultra-Thin Ceramic Membrane for MOX Gas Sensors
(2021) Fritsch, M.; Mosch, S.; Vinnichenko, M.; Trofimenko, N.; Samotaev, N.; Etrekova, M.; Filipchuk, D.; Самотаев, Николай Николаевич; Этрекова, Майя Оразгельдыевна
© 2021, Springer Nature Switzerland AG.The combination of aerosol-jet printing and laser micromilling technology makes it possible to fabricate the ceramics MEMS platforms and SMD packages by using their digital models. It is shown that combination of platinum metallization for the heater and ceramic materials is the best choice for the microelectronic MEMS actuator and sensor package which should be installed in devices aimed for work under harsh environmental conditions. The developed metal-oxide semiconductor gas sensors in miniaturized package with low power consumption can be extremely useful in modern agriculture facilities. The idea of their integration into livestock facilities, food-storage, forestry, fish farming and horticulture seems quite promising for developing smart agriculture, where devices must work under harsh environmental conditions such as high humidity level and temperature. To fulfill the demand of these types of sensors their mass production should be cheap and not require a clean room. In this work we present a way of fabrication of all parts of gas sensor including a package using only one setup, which allows us to reduce the cost of the final product and simplify the whole production process in order to make the technology available for many different agricultural applications.
Только метаданные
Investigation of Selectivity and Reproducibility Characteristics of Gas Capacitive MIS Sensors
(2021) Mikhailov, A.; Etrekova, M.; Litvinov, A.; Samotaev, N.; Filipchuk, D.; Oblov, K.; Этрекова, Майя Оразгельдыевна; Литвинов, Артур Васильевич; Самотаев, Николай Николаевич; Облов, Константин Юрьевич
© 2021, Springer Nature Switzerland AG.The influence of the dielectric material (Ta2O5, Si3N4, (ZrO2)10%(TiO2)90% and SnO2), its formation methods (pulsed laser deposition, plasma-chemical method, sol-gel method, reactive magnetron sputtering) and technological post-processing (forming gas annealing) has been investigated. It is shown that different methods of dielectric material obtaining affect the temperature of maximum sensitivity and response time of gas sensors. However, there is no significant improvement in selectivity in the ppb concentration range. A two-electrode capacitive sensor element was manufactured and tested. The using of two-electrode MIS sensor gives some improvement in selectivity but does not justify the cost of increasing the size and power consumption of the sensors. The reproducibility of characteristics of MIS structures of Pd-SiO2-Si and Pd-Ta2O5-SiO2-Si in sensitivity and response time was studied. More than 90% of suitable MIS structures after forming gas annealing (40 h at TMIS = 130 ℃ in a medium of 2% vol.d. H2 + air) have limit of hydrogen detection 150 ± 75 ppb and characteristic response times to supply and removal of 5 ppm H2 τ0.9 = 5 ± 3 min and τ0.1 = 8 ± 5 min, respectively. It is shown that if the sensor has the greatest sensitivity to hydrogen, then for all other gases it will be also the most sensitive among others. The stability to the effects of NO2 concentration overload was investigated. It is shown that the 1000-fold NO2 concentration overload does not poison the sensor.
Только метаданные
SOI Based Micro-Bead Catalytic Gas Sensor
(2021) Biro, F.; Ducso, C.; Barsony, I.; Samotaev, N.; Pisliakov, A.; Filipchuk, D.; Etrekova, M.; Самотаев, Николай Николаевич; Этрекова, Майя Оразгельдыевна
© 2021, Springer Nature Switzerland AG.One of the most dangerous threats to everyday life and industrial activity is the possible explosion of earth gas, which can occur in various conditions, but usually occurs due to an excess of explosive gases in an enclosed environment. In order to protect people at their home and workplace, several types of gas sensors have been developed. Nevertheless, one of the most useful devices for explosive and combustive gases detection is the catalytic gas sensor. This type of sensors has shown a good performance in detecting of flammable gases with concentration close to the lower explosion limit (LEL). In order to meet the growing need for portable devices further evolution of these gas sensors is required to make them smaller and reduce the power consumption. To achieve this goal it is essential to reduce the 120 to 150 mW power dissipation of the Pt-coil based sensors (pellistors). Low Power Thermocatalytic Sensors manufactured with SOI (silicon on insulator) technology can be functional at temperatures below 600 ℃ with the power consumption in a range of 20–50 mW. The current aim of researches is the elaboration of novel sensor processing and development of nanostructured catalyst layer which is stable and effective at high temperatures and compatible with microelectronic silicon MEMS technology.
Только метаданные
Hydrogen concentration control in oil-filled power transformers using field effect capacitive gas sensors
(2021) Litvinov, A.; Samotaev, N.; Etrekova, M.; Ivanova, A.; Filipchuk, D.; Литвинов, Артур Васильевич; Самотаев, Николай Николаевич; Этрекова, Майя Оразгельдыевна; Иванова, Анастасия Владимировна
© 2021 The Author(s).A simple method is demonstrated for hydrogen concentrations measurement directly in transformer oil and in the gas space above it use a highly sensitive (at the level of units and fractions of ppm) gas sensor based on a metal-insulator-semiconductor capacitive structure (MIS sensor). The results obtained can be used in online monitoring systems and predicting the power transformers integral performance, in particular those that have been put into operation long ago, by tracking slow and invisible at the initial stage aging processes of current-carrying connections and structural elements.
Только метаданные
Methods and Tools for Evaluating the Characteristics of MIS-Capacitor Gas Sensors
(2022) Podlepetsky, B. I.; Samotaev, N. N.; Etrekova, M. O.; Litvinov, A. V.; Подлепецкий, Борис Иванович; Самотаев, Николай Николаевич; Этрекова, Майя Оразгельдыевна; Литвинов, Артур Васильевич
Based on the electrophysical models of electrical characteristics of MIS-capacitor sensors, we analyze the features of methods and tools for evaluating metrological characteristics of the sensors in general terms and using the example of hydrogen-sensitive sensor elements with Pd-SiO2-Si structure. Recommendations are given on the choice of optimal circuit modes for determining the performance characteristics of the sensors of concentrations of hydrogen-containing gases and of gas analyzers for various purposes.
Только метаданные
Selective Ammonia Detection by Field Effect Gas Sensor as an Instrumentation Basis for HP-Infection Primary Diagnosis
(2022) Mikhailov, A.; Samotaev, N.; Etrekova, M.; Litvinov, A.; Самотаев, Николай Николаевич; Этрекова, Майя Оразгельдыевна; Литвинов, Артур Васильевич
© 2022, The Author(s), under exclusive license to Springer Nature Switzerland AG.The clinical tests of device based on Metal Insulator Semiconductor Field Effect (MIS-FE) gas sensor for Helicobacter pylori infection diagnostics (HP-infection) are done by breath test method. This method is based on detecting increase ammonia concentration in patient’s exhaled air after reception of carbamide water solution. The device’s stable operation is based on MIS-FE gas sensor’s high sensitivity to ammonia, sensor’s parameters stability as well as especially developed two channels gas sampling system.
Только метаданные
Technology of SMD MOX gas sensors rapid prototyping
(2020) Samotaev, N.; Oblov, K.; Veselov, D.; Podlepetsky, B.; Etrekova, M.; Volkov, N.; Zibilyuk, N.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Веселов, Денис Сергеевич; Подлепецкий, Борис Иванович; Этрекова, Майя Оразгельдыевна
© 2020 Trans Tech Publications Ltd, Switzerland.This work discusses the design of flexible laser micromilling technology for fast prototyping of metal oxide based (MOX) gas sensors in SMD packages as an alternative to traditional silicon clean room technologies. By laser micromilling technology it is possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also packages for MOX sensor, that gives complete solution for its integration in devices using IoT conception. The tests described in the work show the attainability of the stated results for the fabrication of microhotplates.
Только метаданные
Improvement of field effect capacity type gas sensor thermo inertial parameters by using laser micromilling technique
(2020) Samotaev, N.; Oblov, K.; Etrekova, M.; Veselov, D.; Ivanova, A.; Litvinov, A.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Этрекова, Майя Оразгельдыевна; Веселов, Денис Сергеевич; Иванова, Анастасия Владимировна; Литвинов, Артур Васильевич
© 2020 Trans Tech Publications Ltd, Switzerland.This paper presents a verification of technology aspects for improvement of field effect capacity type gas sensor parameters by using laser micromilling technique for fabrication ceramic surface mounting device (SMD) package and microheater for sustentation working temperature of metal-insulator-semiconductor structure (MIS structure). Innovative claims include: demonstration of flexible opportunities for new digital fabrication process flows based on laser micromilling tech: fast design of SMD sensor 3-D model, flexible changing topology of microheater, thick and thin film technology combination for reducing of power consumption. The results show possibility to fast fabrication functional sensor in customer ceramic SMD package with base 9x9 mm with twice reduced power consumption and improving mechanical properties compare with classical metal-glass microelectronic packages using before for such type sensors.
Только метаданные
Parameter studies of ceramic MEMS microhotplates fabricated by laser micromilling technology
(2020) Samotaev, N.; Oblov, K.; Etrekova, M.; Veselov, D.; Gorshkova, A.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Этрекова, Майя Оразгельдыевна; Веселов, Денис Сергеевич
© 2020 Trans Tech Publications Ltd, Switzerland.This paper presents a modeling of technology aspects for fabrication ceramic microelectromechanical systems (MEMS) microhotplate and surface mounting device (SMD) packaging for (MOX) gas sensors applications. Innovative claims include: demonstration of flexible opportunities for new fabrication process flows based on laser micromilling tech; modeling of power consumption MEMS microhotplate depending on the thickness and topology; demonstration of necessity changing thick film technology of metallization to vacuum sputtering by reducing of power consumption. The results show possibility to fast fabrication of different topologies for ceramic MEMS microhotplate in form-factor of SOT-23 type SMD package.
Только метаданные
Thin platinum films topology formation on ceramic membranes
(2020) Samotaev, N.; Oblov, K.; Etrekova, M.; Ivanova, A.; Veselov, D.; Gorshkova, A.; Самотаев, Николай Николаевич; Облов, Константин Юрьевич; Этрекова, Майя Оразгельдыевна; Иванова, Анастасия Владимировна; Веселов, Денис Сергеевич
© 2020 Trans Tech Publications Ltd, Switzerland.This article presents the technological aspects of experiments on the stable topological patterns formation from thin films of platinum on ceramic membranes. Platinum thin films were deposited by magnetron sputtering on a clean or pre-activated laser ceramics surface. After the deposition of platinum films, the method of various short-term laser irradiation was attempted to form a topological pattern. The results are discussed.